Metrology

Metrology inspection and process control for microlithography XIII

Floor - Floor 2
Published - Society of Photo-optical Instrumentation Engineers, Bellingham, Wash., ©1999
ISBN 10 - 0819431516
ISBN 13 - 0819431516
Book Status - 5 Qnty Available with us.
Subject - Microlithography , Process control
Shelf No - 11
Call Number - 621.3815 MET
Physical Description - 2 volumes (xv, 1052 pages) : illustrations ; 28 cm.
Notes - Includes Index
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